The paper measures the technology efficiency of R&D internationalization of Chinese electron & communication enterprises’ from 2003 to 2008 by using data envelopment analysis, and analyzes the effect of labor capital, material capital and R&D capital on the technology efficiency in foreign R&D invested enterprises by applying the model. The result of research shows that the input and output of Chinese electron& communication enterprises R&D internationalization have increased in recent years while the technology efficiency has not. It is not positive correlation between the increase of labor capital, material capital and R&D capital and the technology efficiency during the period. The research points out that Chinese electron & communication enterprises must strengthen their technological competence and foundation, and the quality rather than quantity of foreign capital inflow should be focused on.